Metal-pattern preparation based on selective deposition using soft organofluorine surfaces
نویسندگان
چکیده
Metal-pattern formation using vacuum evaporation is a critical process from basic research to industrial mass-production. Selective metal deposition metal-atom desorption an organic surface promising metal-patterning method by maskless deposition. In this study, we demonstrate metal-pattern for various species vacuum-depositable and printable perfluoropolyether (PFPE) based material. A PFPE-based film has low dispersion component of free energy softness, its the ability efficiently desorb metals. This method, which enables variety with high melting point intrinsic vapor pressure, including Ag, Cr, Ni, can be applied such applications as electrode-pattern formations.
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ژورنال
عنوان ژورنال: Journal of vacuum science and technology
سال: 2023
ISSN: ['2166-2746', '2166-2754']
DOI: https://doi.org/10.1116/6.0002832